Polymers, Resist Compositions and Patterning Process

专利摘要:
The present invention relates to a polymer compound having a weight average molecular weight of 1,000 to 500,000 comprising a unit represented by the following formula (1) and (2). <Formula 1> <Formula 2> Wherein R 1 is H, CH 3 or CH 2 CO 2 R 3 , R 2 is H, CH 3 or CO 2 R 3 , R 3 is an alkyl group, R 4 is a halogen atom or an acyloxy group, alkoxycarbonyl jade Represents a period or alkylsulfonyloxy group, and some or all of the hydrogen atoms on the constituent carbon atoms may be substituted by halogen atoms, R 5 is H, an alkyl group, R 6 is an acid labile group, Z is a single bond or a divalent hydrocarbon Group, k is 0 or 1, W represents -O- or-(NR)-, R represents a hydrogen atom or a linear, branched, or cyclic alkyl group having 1 to 15 carbon atoms. The resist material using the polymer compound of the present invention as a base resin is useful for fine processing by electron beams or far ultraviolet rays because it is sensitive to high energy rays and excellent in sensitivity, resolution, and etching resistance.
公开号:KR20010099754A
申请号:KR1020010022832
申请日:2001-04-27
公开日:2001-11-09
发明作者:츠네히로 니시；무츠오 나까시마；세이이찌로 다찌바나；다께시 긴쇼；고지 하세가와；다께루 와따나베；준 하따께야마
申请人:카나가와 치히로；신에쓰 가가꾸 고교 가부시끼가이샤；
IPC主号:

专利说明:

Polymer compound, resist material and pattern formation method {Polymers, Resist Compositions and Patterning Process}
[1] The present invention (1) a polymer compound containing a structural unit having an electron withdrawing group at a specific position, (2) it contains a polymer compound as a base resin, and because of its excellent transparency, has a high resolution performance, in particular for the production of ultra LSI The resist material preferable as a fine pattern formation material, and (3) relates to the pattern formation method using a resist material.
[2] In recent years, finer pattern rule has been required due to higher integration and higher speed of LSI, and far ultraviolet lithography has been promising as a next generation fine processing technology. Among them, photolithography using KrF excimer laser light and ArF excimer laser light as a light source is an indispensable technology for ultrafine processing of 0.3 μm or less, and its implementation is urgently required.
[3] Excimer laser light, especially for resist materials used in photolithography using ArF excimer laser light having a wavelength of 193 nm as a light source, not only ensures high transparency at the wavelength, but also has high etching resistance and expensive optical system that can cope with thinning. It is desired to have a high sensitivity that does not burden the material, and above all, a high resolution performance capable of accurately forming fine patterns. In order to meet these demands, it is essential to develop a high transparency, high stiffness, and high reactivity base resin, but none of the presently known high molecular compounds have all of these properties, and yet it is not yet possible to obtain a resist material sufficient for practical use. It is a reality.
[4] As the high transparency resins, copolymers of acrylic acid or methacrylic acid derivatives, polymer compounds containing aliphatic cyclic compounds derived from norbornene derivatives, etc. are known, but not all of them are satisfactory. For example, the copolymer of acrylic acid or methacrylic acid derivatives is relatively easy to increase the reactivity, since it is possible to freely introduce high reactive monomers and increase the amount of acid labile units, but it is very difficult to increase the structural rigidity of the main chain. On the other hand, the rigidity of the polymer compound containing the aliphatic cyclic compound in the main chain is within the allowable range, but the reactivity to the acid is slower than that of the poly (meth) acrylate due to the structure of the main chain, and the degree of polymerization freedom is low, so that the reactivity cannot be easily increased. . Moreover, in general, since resin transparency is considerably lower than poly (meth) acrylate, there was a tendency to further promote the lack of reactivity. Therefore, when a resist material is prepared using these polymer compounds as a base resin in all of the polymer compounds containing poly (meth) acrylate or aliphatic cyclic compounds in the main chain, even if the sensitivity and the resolution are satisfactory, the etching cannot be tolerated or allowed. Even if it had the etching resistance which can be achieved, it showed the reduction degree and the low resolution, and became the unpractical result.
[5] This invention is made | formed in view of the said situation, (1) It contains the high molecular compound which has rigidity and transparency, and (2) contains the said high molecular compound as a base resin, and realizes the sensitivity, resolution, and etching tolerance far exceeding conventional products. It is an object of the present invention to provide a resist material and a pattern forming method using the resist material (3).
[6] MEANS TO SOLVE THE PROBLEM As a result of earnestly examining in order to achieve the said objective, since the polymer compound of the weight average molecular weights 1,000-500,000 containing the unit represented by following formula (1) and (2) has an electron-withdrawing group in a specific position, transparency is It was found that the resist material using this high molecular compound as a base resin was excellent in sensitivity, resolution, and etching resistance, and this resist material was very effective for precise microfabrication.
[7] That is, the present invention provides the following polymer compound.
[8] [I] A polymer compound having a weight average molecular weight of 1,000 to 500,000, including units represented by the following formulas (1) and (2).
[9]
[10]
[11] Wherein, R ¹ is a hydrogen atom, a methyl group or ^{_{CH 2 CO 2 R 3, R}} 2 denotes a hydrogen atom, a methyl group or CO ₂ R ^3, R ³ is a straight, branched or cyclic having 1 to 15 carbon atoms Represents an alkyl group, R ⁴ represents a halogen atom or an acyloxy group, alkoxycarbonyloxy group or alkylsulfonyloxy group having 1 to 15 carbon atoms, wherein some or all of the hydrogen atoms on the constituent carbon atoms are substituted by halogen atoms R <^5> may represent a hydrogen atom or a C1-C10 linear, branched or cyclic alkyl group, R <^6> represents an acid labile group, Z is a single bond or C1-C10 linear, branched or A cyclic divalent hydrocarbon group, k is 0 or 1, W represents -O- or-(NR)-, and R represents a hydrogen atom or a linear, branched or cyclic alkyl group having 1 to 15 carbon atoms .
[12] [II] The polymer compound according to the above [I], wherein the unit represented by the formula (1) is a unit represented by the following formula (3) or (4).
[13]
[14]
[15] In formula, R <^1> -R <^5> , Z, k are the same as the above, R <^7> -R <^10> may respectively independently be a C1-C8 linear, branched or cyclic alkyl group, or C6-C20 may be substituted. Y represents an aryl group, and Y represents a divalent hydrocarbon group having 4 to 15 carbon atoms which may include a hetero atom, and together with the carbon atoms bonded at both ends, forms a ring.
[16] [III] The polymer compound according to the above [I] or [II], further comprising one or two or more of the units represented by the following Chemical Formulas 5 to 8.
[17]
[18]
[19]
[20]
[21] In formula, R <^1> , R <^2> , k is the same as the above, One or more of R <^11> -R <^14> represents the monovalent hydrocarbon group containing a C1-C15 carboxy group or a hydroxyl group, and remainder each independently represents a hydrogen atom Or a linear, branched or cyclic alkyl group having 1 to 15 carbon atoms, and R ¹¹ to R ¹⁴ may form a ring with each other, in which case at least one of R ¹¹ to R ¹⁴ is a carboxy group having 1 to 15 carbon atoms. Or a divalent hydrocarbon group containing a hydroxyl group, the remainder each independently represents a single bond or a linear, branched or cyclic alkylene group having 1 to 15 carbon atoms, and at least one of R ¹⁵ to R ¹⁸ has 2 to C carbon atoms. 15 of -CO ₂ - represents a monovalent hydrocarbon group containing a partial structure and the remainder represent straight, branched or cyclic alkyl group, independently, a hydrogen atom or 1 to 15 carbon atoms respectively, It said, R ¹⁵ to R ¹⁸ may also form a ring with each other, in which case R ¹⁵ to R ¹⁸ is one out of more than -CO ₂ C 1 -C 15 - represents a divalent hydrocarbon group containing a partial structure and the rest Each independently represents a single bond or a linear, branched or cyclic alkylene group having 1 to 15 carbon atoms, R ¹⁹ represents an alkyl group containing a 7 to 15 polycyclic hydrocarbon group or a polycyclic hydrocarbon group, and R ²⁰ is An acid labile group is represented and X represents -CH ₂ -or -O-.
[22] In addition, the present invention provides the following resist material.
[23] [IV] A resist material containing the polymer compound according to any one of [I] to [III].
[24] Moreover, this invention also provides the following pattern formation method.
[25] [V] A process of applying the resist material according to [IV] on a substrate, a step of exposing with a high energy ray or an electron beam through a photomask after heat treatment, and developing after using a developer after heat treatment as necessary. A pattern forming method comprising the step.
[26] In the unit represented by the said Formula (1), an electron withdrawing group is introduce | transduced on the carbon atom adjacent to the alicyclic ring which comprises a main chain. As a result, the electron distribution and the steric structure of the polymer compound as a whole change, and the detailed reason is not clear, but as a result, transparency is greatly improved, especially at a wavelength of 193 nm to the same level as poly (meth) acrylate. Therefore, the resist material using this as a base resin eliminates the pure taper shape and inadequate removal which appear in the prior art without impairing the merit of the high molecular compound which contains the aliphatic cyclic compound excellent in etching resistance in a main chain at all.
[27] Hereinafter, the present invention will be described in more detail.
[28] The polymer compound of the present invention has a weight average molecular weight of 1,000 to 500,000 including units represented by the following formulas (1) and (2).
[29] <Formula 1>
[30]
[31] <Formula 2>
[32]
[33] In addition, in the above formula k is 0 or 1, and therefore, Formula 1 may be represented by the following formula (1-1) and 1-2.
[34]
[35] Here, R ¹ represents a hydrogen atom, a methyl group or CH ₂ CO ₂ R ³ . R ² represents a hydrogen atom, a methyl group or CO ₂ R ³ . R ³ represents a linear, branched or cyclic alkyl group having 1 to 15 carbon atoms, specifically methyl, ethyl, propyl, isopropyl, n-butyl, sec-butyl, tert-butyl, tert-amyl, n- Pentyl, n-hexyl, cyclopentyl, cyclohexyl, ethylcyclopentyl, butylcyclopentyl, ethylcyclohexyl, butylcyclohexyl, adamantyl, ethyl adamantyl, butyl adamantyl and the like. R ⁴ represents a halogen atom or an acyloxy group, alkoxycarbonyloxy group or alkylsulfonyloxy group having 1 to 15 carbon atoms, and some or all of the hydrogen atoms on the constituent carbon atoms may be substituted by halogen atoms, specifically Is fluorine, chlorine, bromine, formyloxy, acetoxy, ethylcarbonyloxy, pivaloyloxy, methoxycarbonyloxy, ethoxycarbonyloxy, tert-butoxycarbonyloxy, methanesulfonyloxy, ethane Sulfonyloxy, n-butanesulfonyloxy, trifluoroacetoxy, trichloroacetoxy, 2,2,2-trifluoroethylcarbonyloxy group, and the like. R ⁵ represents a hydrogen atom or a linear, branched or cyclic alkyl group having 1 to 10 carbon atoms, specifically methyl, ethyl, propyl, isopropyl, n-butyl, sec-butyl, tert-butyl, tert-amyl , n-pentyl, n-hexyl, cyclopentyl, cyclohexyl, cyclopentylethyl, cyclopentylbutyl, cyclohexylethyl, cyclohexylbutyl, etc. can be illustrated. R ⁶ represents an acid labile group. Z represents a single bond or a linear, branched or cyclic divalent hydrocarbon group having 1 to 10 carbon atoms, specifically methylene, ethane-1,1-diyl, ethane-1,2-diyl, propane-1,1 -Diyl, propane-1,2-diyl, propane-1,3-diyl, cyclohexane-1,4-diyl and the like can be exemplified. W represents -O- or-(NR)-, R represents a hydrogen atom or a linear, branched or cyclic alkyl group having 1 to 15 carbon atoms, specifically, the same as those exemplified for R ³ have.
[36] Moreover, although the thing similar to R <^{20> mentioned} later is mentioned as an acid labile group of R <^6> , It is especially preferable that it is represented by a following formula.
[37]
[38] Therefore, as a unit represented by the said Formula (1), the unit represented by following formula (3) or 4 is especially preferable.
[39] <Formula 3>
[40]
[41] <Formula 4>
[42]
[43] Here, R ¹ to R ⁵ , Z, k are the same as above. R ⁷ to R ¹⁰ each independently represent a linear, branched or cyclic alkyl group having 1 to 8 carbon atoms or an aryl group which may be substituted with 6 to 20 carbon atoms, and specifically, as a linear, branched or cyclic alkyl group, Methyl, ethyl, propyl, isopropyl, n-butyl, sec-butyl, tert-butyl, tert-amyl, n-pentyl, n-hexyl, cyclopentyl, cyclohexyl, cyclopentylmethyl, cyclopentylethyl, cyclohexylmethyl , Cyclohexylethyl and the like can be exemplified. Specific examples of the aryl group which may be substituted include phenyl, methylphenyl, naphthyl, anthryl, phenanthryl, pyrenyl and the like. Y represents a divalent hydrocarbon group having 4 to 15 carbon atoms which may include a hetero atom, and is a ring formed by forming a ring together with carbon atoms bonded at both ends, and specifically, cyclopentane, cyclopentene, cyclohexane, cyclohexene , Bicyclo [2.2.1] heptane, bicyclo [4.4.0] decane, tricyclo [5.2.1.0 ^2,6 ] decane, tetracyclo [4.4.0.1 ^2,5 .1 ^7,10 ] decane, adamantane And the like can be exemplified.
[44] As a unit represented by the said Formula (1) and a unit represented by the said Formula (3) or 4, the following can be illustrated specifically ,.
[45]
[46] The polymer compound of the present invention may also include one or two or more of the units represented by the following Chemical Formulas 5 to 8.
[47] <Formula 5>
[48]
[49] <Formula 6>
[50]
[51] <Formula 7>
[52]
[53] <Formula 8>
[54]
[55] In addition, in the above formula, X represents -CH ₂ -or -O-, k is 0 or 1, and thus the formulas 5 to 8 may be represented by the formulas 5-1 to 8-2.
[56]
[57] Here, R ¹ , R ² , k, and X are the same as above. ^At least one of R ¹¹ to R ¹⁴ represents a monovalent hydrocarbon group (preferably a linear, branched or cyclic alkyl group) containing a carboxyl group or a hydroxyl group having 1 to 15 carbon atoms, and the others each independently represent a hydrogen atom or C1-C15 linear, branched, or cyclic alkyl group is represented. Specific examples of the monovalent hydrocarbon group containing a carboxyl group or a hydroxyl group having 1 to 15 carbon atoms include carboxy, carboxymethyl, carboxyethyl, carboxybutyl, hydroxymethyl, hydroxyethyl, hydroxybutyl, 2-carboxyethoxycarbonyl, 4 -Carboxybutoxycarbonyl, 2-hydroxyethoxycarbonyl, 4-hydroxybutoxycarbonyl, carboxycyclopentyloxycarbonyl, carboxycyclohexyloxycarbonyl, carboxynorbornyloxycarbonyl, carboxyl Butylcyclocarbonyl, hydroxycyclopentyloxycarbonyl, hydroxycyclohexyloxycarbonyl, hydroxynorbornyloxycarbonyl, hydroxyadamantyloxycarbonyl and the like can be exemplified. As a C1-C15 linear, branched or cyclic alkyl group, the thing similar to what was specifically illustrated by R <^3> can be illustrated. R ¹¹ to R ¹⁴ may form a ring with each other, in which case at least one of R ¹¹ to R ¹⁴ may be a divalent hydrocarbon group (preferably linear or branched) containing a carboxy group or hydroxyl group having 1 to 15 carbon atoms. Or a cyclic alkylene group), and the remaining ones each independently represent a single bond or a linear, branched or cyclic alkylene group having 1 to 15 carbon atoms. As a bivalent hydrocarbon group containing a C1-C15 carboxyl group or a hydroxyl group, the thing etc. which removed one hydrogen atom specifically from what was illustrated by the said monovalent hydrocarbon group containing a carboxyl group or a hydroxyl group can be illustrated. As a C1-C15 linear, branched, or cyclic alkylene group, what specifically removed one hydrogen atom from what was illustrated by R <^3> , etc. can be illustrated. R ¹⁵ to R ¹⁸ is at least one of 2 to 15 carbon atoms of -CO ₂ - represents a monovalent hydrocarbon group containing a partial structure and the rest each independently represents a hydrogen atom or a C 1 -C 15 straight, branched or cyclic An alkyl group of. As the monovalent hydrocarbon group containing a -CO ₂ -partial structure having 2 to 15 carbon atoms, specifically, 2-oxooxolan-3-yl oxycarbonyl, 4,4-dimethyl-2-oxooxolan-3-yl oxy Carbonyl, 4-methyl-2-oxooxan-4-yl oxycarbonyl, 2-oxo-1,3-dioxolan-4-yl methyloxycarbonyl, 5-methyl-2-oxooxolane-5- One oxycarbonyl etc. can be illustrated. As a C1-C15 linear, branched or cyclic alkyl group, the thing similar to what was specifically illustrated by R <^3> can be illustrated. R ¹⁵ to R ¹⁸ may form a ring with each other, in which case at least one of R ¹⁵ to R ¹⁸ represents a divalent hydrocarbon group containing a -C0 ₂ -substructure having 1 to 15 carbon atoms, and the remaining ones are each independently And a single bond or a linear, branched or cyclic alkylene group having 1 to 15 carbon atoms. 1 to 15 carbon atoms in the -C0 ₂ - _2-valent hydrocarbon group containing a partial structure as specifically 1-oxo-2-oxa-propane-1,3-diyl, 1,3-dioxo-2-oxa-propane-1, 1 containing the -C0 ₂ -partial structure, in addition to 3-diyl, 1-oxo-2-oxabutane-1,4-diyl, 1,3-dioxo-2-oxabutane-1,4-diyl and the like The thing etc. which removed one hydrogen atom from what was illustrated by the hydrocarbon group etc. can be illustrated. As a C1-C15 linear, branched, or cyclic alkylene group, what specifically removed one hydrogen atom from what was illustrated by R <^3> , etc. can be illustrated. R ¹⁹ represents a polycyclic hydrocarbon group having 7 to 15 carbon atoms or an alkyl group containing a polycyclic hydrocarbon group, specifically, norbornyl, bicyclo [3.3.1] nonyl, tricyclo [5.2.1.0 ^2,6 ] decyl , Adamantyl, ethyl adamantyl, butyl adamantyl, norbornylmethyl, adamantylmethyl and the like. R ²⁰ represents an acid labile group.
[58] As the acid labile group of R ²⁰ , various kinds can be selected, but specifically, a group represented by the following formulas L1 to L4, a C4-20, preferably a 4-15 tertiary alkyl group, and each alkyl group have 1 to 6 carbon atoms, respectively. Trialkylsilyl group, an oxoalkyl group having 4 to 20 carbon atoms, and the like.
[59]
[60] In the formula, the chain line represents the bond seam (hereinafter, the same). R ^L01 and R ^L02 represent a hydrogen atom or a linear, branched or cyclic alkyl group having 1 to 18 carbon atoms, preferably 1 to 10 carbon atoms, specifically methyl, ethyl, propyl, isopropyl and n-butyl Group, sec-butyl group, tert-butyl group, cyclopentyl group, cyclohexyl group, 2-ethylhexyl group, n-octyl group, etc. can be illustrated. R ^L03 represents a monovalent hydrocarbon group which may contain a hetero atom such as an oxygen atom having 1 to 18 carbon atoms, preferably 1 to 10 carbon atoms, a linear, branched or cyclic alkyl group, and some of these hydrogen atoms are hydroxyl groups, The thing substituted by the alkoxy group, oxo group, amino group, alkylamino group, etc. are mentioned, Specifically, the following substituted alkyl group etc. can be illustrated.
[61]
[62] R ^L01 and R ^L02 , R ^L01 and R ^L03 , R ^L02 and R ^L03 may form a ring, and when forming a ring, R ^L01 , R ^L02 and R ^L03 each have 1 to 18 carbon atoms, preferably 1 to 18 carbon atoms. 10 linear or branched alkylene groups are shown.
[63] R ^L04 represents a C4-C20, preferably a C3- ^C15 tertiary alkyl group, each alkyl group each having a trialkylsilyl group having 1 to 6 carbon atoms, an oxoalkyl group having 4 to 20 carbon atoms, or a group represented by the above formula L1, Specific examples of tertiary alkyl groups include tert-butyl, tert-amyl, 1,1-diethylpropyl, 1-ethylcyclopentyl, 1-butylcyclopentyl, 1-ethylcyclohexyl and 1-butyl Cyclohexyl group, 1-ethyl-2-cyclopentenyl group, 1-ethyl-2-cyclohexenyl group, 2-methyl-2-adamantyl group, and the like. Specific examples of the trialkylsilyl group include trimethylsilyl. And triethylsilyl group, dimethyl-tert-butylsilyl group and the like. Specific examples of the oxoalkyl group include 3-oxocyclohexyl group, 4-methyl-2-oxooxan-4-yl group, and 5-methyl-. 5-oxo oxolan-4-yl group etc. are mentioned. y is an integer of 0-6.
[64] R ^L05 represents a linear or branched alkyl group having 1 to 8 carbon atoms or an aryl group which may be substituted with 6 to 20 carbon atoms. Specific examples of the linear, branched or cyclic alkyl group include methyl, ethyl, propyl and iso. A propyl group, n-butyl group, sec-butyl group, tert-butyl group, tert-amyl group, n-pentyl group, n-hexyl group, etc. can be illustrated, A aryl group which may be substituted specifically, a phenyl group , Methylphenyl group, naphthyl group, anthryl group, phenanthryl group, pyrenyl group and the like can be exemplified. m is 0 or 1, n is 0, 1, 2, 3, and is a number which satisfy | fills 2m + n = 2 or 3.
[65] R ^L06 represents a linear, branched or cyclic alkyl group having 1 to 8 carbon atoms or an aryl group which may be substituted with 6 to 20 carbon atoms, and specifically, the same as those for R ^L05 can be exemplified. R ^L07 to R ^L16 each independently represent a hydrogen atom or a monovalent hydrocarbon group which may include a hetero atom having 1 to 15 carbon atoms, and a methyl group, an ethyl group, a propyl group, an isopropyl group, an n-butyl group, and a sec-butyl group , tert-butyl group, tert-amyl group, n-pentyl group, n-hexyl group, n-octyl group, n-nonyl group, n-decyl group, cyclopentyl group, cyclohexyl group, cyclopentylmethyl group, cyclopentyl Linear, branched or cyclic alkyl groups such as ethyl group, cyclopentylbutyl group, cyclohexylmethyl group, cyclohexylethyl group and cyclohexylbutyl group, and some of these hydrogen atoms are hydroxyl group, alkoxy group, carboxyl group, alkoxycarbonyl group, oxo group, The thing substituted by an amino group, an alkylamino group, a cyano group, a mercapto group, an alkylthio group, a sulfo group, etc. can be illustrated. R ^L07 to R ^L16 may form a ring with each other (for example, R ^L07 and R ^L08 , R ^L07 and R ^L09 , R ^L08 and R ^L10 , R ^L09 and R ^L10 , R ^L11 and R ^L12 , R ^L13 And R ^L14 ), in which case a divalent hydrocarbon group which may include a hetero atom having 1 to 15 carbon atoms, and one hydrogen atom removed from the one exemplified in the monovalent hydrocarbon group can be exemplified. . In addition, R ^L07 to R ^L16 may be bonded to adjacent carbon directly to form a double bond (for example, R ^L07 and R ^L09 , R ^L09 and R ^L15 , R ^L13 and R ^L15, etc.).
[66] Among the acid labile groups represented by the above formula (L1), the following groups may be specifically exemplified as linear or branched groups.
[67]
[68] Among the acid labile groups represented by the above formula (L1), specifically, cyclic ones include tetrahydrofuran-2-yl group, 2-methyltetrahydrofuran-2-yl group, tetrahydropyran-2-yl group and 2-methyltetrahydropyran- 2- diyl group etc. can be illustrated.
[69] Specific examples of the acid labile group of formula (L2) include tert-butoxycarbonyl group, tert-butoxycarbonylmethyl group, tert-amyloxycarbonyl group, tert-amyloxycarbonylmethyl group, 1,1-diethylpropyloxycarbonyl group, 1,1 -Diethylpropyloxycarbonylmethyl group, 1-ethylcyclopentyloxycarbonyl group, 1-ethylcyclopentyloxycarbonylmethyl group, 1-ethyl-2-cyclopentenyloxycarbonyl group, 1-ethyl-2-cyclopentenyloxycarbon A carbonylmethyl group, 1-ethoxyethoxycarbonylmethyl group, 2-tetrahydropyranyloxycarbonylmethyl group, 2-tetrahydrofuranyloxycarbonylmethyl group, etc. can be illustrated.
[70] Specific examples of the acid labile group of formula (L3) include 1-methylcyclopentyl, 1-ethylcyclopentyl, 1-n-propylcyclopentyl, 1-isopropylcyclopentyl, 1-n-butylcyclopentyl, and 1-sec-butylcyclo Pentyl, 1-methylcyclohexyl, 1-ethylcyclohexyl, 3-methyl-1-cyclopenten-3-yl, 3-ethyl-1-cyclopenten-3-yl, 3-methyl-1-cyclohexene-3 -Yl, 3-ethyl-1-cyclohexen-3-yl and the like can be exemplified.
[71] As an acid labile group of the said Formula L4, the following group can be illustrated concretely.
[72]
[73] Examples of the tertiary alkyl group, trialkylsilyl group, and oxoalkyl group in the acid labile group of R ²⁰ include those mentioned above.
[74] In addition, the acid labile group of R ²⁰ can be used individually by 1 type or in combination of 2 or more type. By using a plurality of acid labile groups, fine adjustment of the pattern profile can be performed.
[75] Preparation of the polymer compound of the present invention is selected from the group of compounds represented by the following formula (1a) as a first monomer, the compound represented by the formula (2a) as a second monomer, and optionally represented by the formula (5a to 8a) It can be performed by the copolymerization reaction which used 1 type, or 2 or more types as a monomer after 3rd.
[76]
[77] In formula, R <^1> -R <^20> , W, X, Y, Z, k are the same as the above.
[78] In the production of the polymer compound of the present invention,
[79] (i) the monomer of Formula 1a
[80] (ii) the monomer of Formula 2a
[81] In addition, as required
[82] (iii) may be prepared by copolymerizing the monomers of Chemical Formulas 5a to 8a, but may be further added as necessary.
[83] (iv) substituted acrylic esters such as monomers containing carbon-carbon double bonds other than the above (i) to (iii), such as methyl methacrylate, methyl crotonate, dimethyl maleate and dimethyl itaconic acid, Copolymerize unsaturated carboxylic acids such as maleic acid, fumaric acid and itaconic acid, substituted norbornenes such as norbornene, methyl norbornene-5-carboxylic acid, unsaturated acid anhydrides such as idaconic anhydride, and other monomers It may be.
[84] The copolymerization reaction is carried out by mixing the monomers of (i) to (iv) in an appropriate ratio in consideration of the reaction rate, or dissolving in a solvent as necessary, and then coexisting with a suitable polymerization initiator or catalyst, and over a suitable reaction time under suitable temperature conditions. do. Although various things can be considered as a copolymerization reaction, a radical polymerization reaction is preferable.
[85] The reaction conditions of the radical polymerization reaction include (a) hydrocarbons such as benzene, ethers such as tetrahydrofuran, alcohols such as ethanol, and ketones such as methyl isobutyl ketone, and (b) as a polymerization initiator. Azo compounds such as 2,2'-azobisisobutyronitrile or peroxides such as benzoyl peroxide and lauroyl peroxide are used, and (c) the reaction temperature is maintained at 0 ° C. to 10 ° C., and (d) reaction. Although it is preferable to make time into about 0.5 to 48 hours, it does not exclude the case out of this range.
[86] In the copolymerization reaction, a polymer compound capable of exhibiting desirable performance when a resist material is obtained by appropriately adjusting the abundance ratio of each monomer can be obtained. In this case, as a content rate of each structural unit
[87] (I) The structural unit of the formula (1) based on the monomer of formula (1a) is more than 0 mol% 50 mol%, preferably 20 to 50 mol%, more preferably 30 to 50 mol%
[88] (II) The structural unit of the formula (2) based on the monomer of the formula (2a) is more than 0 mol% 50 mol%, preferably 20 to 50 mol%, more preferably 30 to 50 mol%
[89] (III) 0 to 50 mol%, preferably 0 to 30 mol%, more preferably one or two or more of the structural units of the formulas (5) to (8) based on the monomers of the formulas (5a) to (8a) as necessary; 0-20 mol%
[90] (IV) Further 0 to 50 mol%, preferably 0 to 30 mol%, more preferably 0 to 20 mol% of one or two or more of the structural units based on the above (iv) monomers, if necessary. It can be, but it does not exclude the case outside this range.
[91] In addition, the weight average molecular weight of the polymer compound including the units represented by Formulas 1 and 2 of the present invention is 1,000 to 500,000, preferably 3,000 to 100,000. If it is out of this range, etching resistance may fall extremely, or the dissolution rate difference may not be ensured before and after exposure, and resolution may fall.
[92] The high molecular compound of the present invention is effective as a base polymer of a resist material, and the present invention provides a resist material comprising such a high molecular compound.
[93] In addition, the resist material of the present invention may include a high molecular compound, a compound that generates an acid in response to a high energy ray or an electron beam (hereinafter, an acid generator) and an organic solvent.
[94] As the acid generator used in the present invention,
[95] i. An onium salt of the formula P1a-1, P1a-2 or P1b,
[96] ii. A diazomethane derivative of the formula P2,
[97] iii. Glyoxime derivatives of the formula
[98] iv. A bissulphone derivative of the formula P4,
[99] v. Sulfonic acid esters of N-hydroxyimide compounds of formula P5,
[100] vi. β-ketosulfonic acid derivatives,
[101] vii. Disulfone derivatives,
[102] viii. Nitrobenzylsulfonate derivatives,
[103] ix. Sulfonic acid ester derivatives;
[104]
[105] In formula, R <^101a> , R <^101b> , R <^101c> is C1-C12 linear, branched or cyclic alkyl group, alkenyl group, oxoalkyl group, or oxo alkenyl group, C6-C20 aryl group, or C7-C20 respectively An aralkyl group or an aryloxoalkyl group of 12, and some or all of the hydrogen atoms of these groups may be substituted by an alkoxy group or the like, and R ^101b and R ^101c may form a ring, and when forming a ring, R ^101b and R ^101c each represent an alkylene group having 1 to 6 carbon atoms, and K ⁻ represents a non-nucleophilic counter ion.
[106] R ^101a , R ^101b , and R ^101c may be the same as or different from each other, and specifically, as an alkyl group, methyl, ethyl, propyl, isopropyl, n-butyl, sec-butyl, tert-butyl, Pentyl, hexyl, heptyl, octyl, cyclopentyl, cyclohexyl, cycloheptyl, cyclopropylmethyl, 4-methylcyclohexyl, cyclohexylmethyl, norbornyl, adamantyl have. Examples of the alkenyl group include vinyl group, allyl group, propenyl group, butenyl group, hexenyl group, cyclohexenyl group and the like. 2-oxocyclopentyl group, 2-oxocyclohexyl group, etc. are mentioned as an oxoalkyl group, 2-oxopropyl group, 2-cyclopentyl-2-oxoethyl group, 2-cyclohexyl-2-oxoethyl group, 2- (4-methylcyclohexyl) -2-oxoethyl group etc. are mentioned. As an aryl group, alkoxy, such as a phenyl group, a naphthyl group, and a p-methoxyphenyl group, m-methoxyphenyl group, o-methoxyphenyl group, an ethoxyphenyl group, p-tert-butoxyphenyl group, m-tert-butoxyphenyl group, etc. Alkyl naph, such as alkylphenyl groups, such as a phenyl group, 2-methylphenyl group, 3-methylphenyl group, 4-methylphenyl group, ethylphenyl group, 4-tert- butylphenyl group, 4-butylphenyl group, and dimethylphenyl group, methylnaphthyl group, and ethyl naphthyl group, etc. Dialkoxy naphthyl groups, such as an alkoxy naphthyl group, such as a methyl group, a methoxy naphthyl group, and an ethoxy naphthyl group, a dimethyl naphthyl group, a diethyl naphthyl group, dialkoxy naphthyl groups, such as a dialkyl naphthyl group, a dimethoxy naphthyl group, and a diethoxy naphthyl group, etc. are mentioned. Can be. Examples of the aralkyl group include benzyl group, phenylethyl group and phenethyl group. As an aryl oxo alkyl group, 2-aryl-2-oxoethyl groups, such as a 2-phenyl- 2-oxo ethyl group, 2- (1-naphthyl) -2-oxoethyl group, 2- (2-naphthyl) -2-oxoethyl group, etc. Etc. can be mentioned. Examples of non-nucleophilic counter ions of K ⁻ include halide ions such as chloride ions and bromide ions, triflate, fluoroalkylsulfonates such as 1,1,1-trifluoroethanesulfonate and nonafluorobutanesulfonate, and tosyl Alkyl sulfonates, such as aryl sulfonates, a mesylate, butane sulfonate, such as a late, a benzene sulfonate, 4-fluorobenzene sulfonate, a 1,2,3,4,5-pentafluorobenzene sulfonate, are mentioned. have.
[107]
[108] In the formula, R ^102a and R ^102b each represent a linear, branched or cyclic alkyl group having 1 to 8 carbon atoms, R ¹⁰³ represents a linear, branched or cyclic alkylene group having 1 to 10 carbon atoms, and R ^104a. And R ^104b each represent a 2-oxoalkyl group having 3 to 7 carbon atoms, and K ⁻ represents a non-nucleophilic counter ion.
[109] Specific examples of the R ^102a and R ^102b include methyl, ethyl, propyl, isopropyl, n-butyl, sec-butyl, tert-butyl, pentyl, hexyl, heptyl, octyl and cyclophene A methyl group, a cyclohexyl group, a cyclopropylmethyl group, 4-methylcyclohexyl group, a cyclohexylmethyl group, etc. are mentioned. ^Examples of R ¹⁰³ include methylene group, ethylene group, propylene group, butylene group, pentylene group, hexylene group, heptylene group, octylene group, nonylene group, 1,4-cyclohexylene group, 1,2-cyclohexylene group, 1 A, 3-cyclopentylene group, a 1, 4- cyclooctylene group, a 1, 4- cyclohexane dimethylene group, etc. are mentioned. ^{Examples of} R ^104a and R ^104b include a 2-oxopropyl group, a 2-oxocyclopentyl group, a 2-oxocyclohexyl group, a 2-oxocycloheptyl group, and the like. K ^- may be the same as described in the formulas P1a-1 and P1a-2.
[110]
[111] In the formula, R ¹⁰⁵ and R ¹⁰⁶ represent a linear, branched or cyclic alkyl group or a halogenated alkyl group having 1 to 12 carbon atoms, an aryl group or halogenated aryl group having 6 to 20 carbon atoms, or an aralkyl group having 7 to 12 carbon atoms.
[112] ^Examples of the alkyl group of R ¹⁰⁵ and R ¹⁰⁶ include methyl group, ethyl group, propyl group, isopropyl group, n-butyl group, sec-butyl group, tert-butyl group, pentyl group, hexyl group, heptyl group, octyl group, amyl group and cyclo A pentyl group, a cyclohexyl group, a cycloheptyl group, a norbornyl group, an adamantyl group etc. are mentioned. Examples of the halogenated alkyl group include trifluoromethyl group, 1,1,1-trifluoroethyl group, 1,1,1-trichloroethyl group, and nonafluorobutyl group. As an aryl group, alkoxyphenyl groups, such as a phenyl group, p-methoxyphenyl group, m-methoxyphenyl group, o-methoxyphenyl group, ethoxyphenyl group, p-tert-butoxyphenyl group, and m-tert-butoxyphenyl group, 2-methylphenyl Alkylphenyl groups, such as group, 3-methylphenyl group, 4-methylphenyl group, ethylphenyl group, 4-tert- butylphenyl group, 4-butylphenyl group, and a dimethylphenyl group, are mentioned. Examples of the halogenated aryl group include a fluorophenyl group, a chlorophenyl group, 1,2,3,4,5-pentafluorophenyl group, and the like. As an aralkyl group, a benzyl group, a phenethyl group, etc. are mentioned.
[113]
[114] In formula, R <^107> , R <^108> , R <^109> is a C1-C12 linear, branched or cyclic alkyl group or a halogenated alkyl group, a C6-C20 aryl group or a halogenated aryl group, or C7-C12 aralkyl Group, R ¹⁰⁸ and R ¹⁰⁹ may be bonded to each other to form a cyclic structure, and when forming a cyclic structure, R ¹⁰⁸ and R ¹⁰⁹ each represent a linear or branched alkylene group having 1 to 6 carbon atoms.
[115] Examples of the alkyl group, halogenated alkyl group, aryl group, halogenated aryl group, and aralkyl group for R ¹⁰⁷ , R ¹⁰⁸ and R ¹⁰⁹ include the same as those described for R ¹⁰⁵ and R ¹⁰⁶ . Also, R ^108, R ¹⁰⁹ of the alkylene group may be mentioned methylene group, ethylene group, propylene group, butylene group, hexylene group and the like.
[116]
[117] In formula, ^R101a and ^R101b are the same as the above.
[118]
[119] In the formula, R ¹¹⁰ represents an arylene group having 6 to 10 carbon atoms, an alkylene group having 1 to 6 carbon atoms, or an alkenylene group having 2 to 6 carbon atoms, and some or all of the hydrogen atoms of these groups are straight chains having 1 to 4 carbon atoms or Or may be further substituted with a branched alkyl or alkoxy group, nitro group, acetyl group, or phenyl group, R ¹¹¹ is a linear, branched or substituted alkyl group having 1 to 8 carbon atoms, alkenyl group or alkoxyalkyl group, phenyl group, or A naphthyl group, and some or all of the hydrogen atoms of these groups are an alkyl or alkoxy group having 1 to 4 carbon atoms; Phenyl group which may be further substituted by C1-C4 alkyl group, alkoxy group, nitro group, or acetyl group; Hetero aromatic groups having 3 to 5 carbon atoms; Or a chlorine atom or a fluorine atom.
[120] Here, as the arylene group of R ¹¹⁰ , a 1,2-phenylene group, a 1,8-naphthylene group, and the like, and as an alkylene group, a methylene group, a 1,2-ethylene group, a 1,3-propylene group, 1,4- The butylene group, 1-phenyl-1,2-ethylene group, norbornane-2,3-diyl group, etc. As an alkenylene group, 1,2-vinylene group, 1-phenyl-1,2-vinylene group, 5 And norbornene-2,3-diyl groups. ^Examples of the alkyl group of R ¹¹¹ are the same as those of R ^101a to R ^{101c. Examples} of the alkenyl group include a vinyl group, 1-propenyl group, allyl group, 1-butenyl group, 3-butenyl group, isofurenyl group, 1-pentenyl group, and 3-pente. A nilyl group, 4-pentenyl group, dimethylallyl group, 1-hexenyl group, 3-hexenyl group, 5-hexenyl group, 1-heptenyl group, 3-heptenyl group, 6-heptenyl group, 7-octenyl group, etc. As the alkoxyalkyl group, methoxymethyl group, ethoxymethyl group, propoxymethyl group, butoxymethyl group, pentyloxymethyl group, hexyloxymethyl group, heptyloxymethyl group, methoxyethyl group, ethoxyethyl group, propoxyethyl group, butoxyethyl group, pentyloxy Ethyl group, hexyloxyethyl group, methoxypropyl group, ethoxypropyl group, propoxypropyl group, butoxypropyl group, methoxybutyl group, ethoxybutyl group, propoxybutyl group, methoxypentyl group, ethoxypentyl group , Methoxyhexyl group, methoxyheptyl group and the like.
[121] In addition, examples of the alkyl group having 1 to 4 carbon atoms which may be further substituted include methyl group, ethyl group, propyl group, isopropyl group, n-butyl group, isobutyl group, tert-butyl group and the like. A phenyl group which may be substituted with an alkyl group, an alkoxy group, a nitro group, or an acetyl group having 1 to 4 carbon atoms, such as a period, an ethoxy group, a propoxy group, an isopropoxy group, n-butoxy group, isobutoxy group, tert-butoxy group, etc. Examples of the phenyl group, tolyl group, p-tert-butoxyphenyl group, p-acetylphenyl group, p-nitrophenyl group and the like include pyridyl group, furyl group and the like as the hetero aromatic group having 3 to 5 carbon atoms.
[122] Specifically, for example, trifluoromethanesulfonic acid diphenyliodium, trifluoromethanesulfonic acid (p-tert-butoxyphenyl) phenyliodium, p-toluenesulfonic acid diphenyliodium, p-toluenesulfonic acid (p -tert-butoxyphenyl) phenyliodonium, trifluoromethanesulfonic acid triphenylsulfonium, trifluoromethanesulfonic acid (p-tert-butoxyphenyl) diphenylsulfonium, trifluoromethanesulfonic acid bis (p-tert -Butoxyphenyl) phenylsulfonium, trifluoromethanesulfonic acid tris (p-tert-butoxyphenyl) sulfonium, p-toluenesulfonic acid triphenylsulfonium, p-toluenesulfonic acid (p-tert-butoxyphenyl) di Phenylsulfonium, p-toluenesulfonic acid bis (p-tert-butoxyphenyl) phenylsulfonium, p-toluenesulfonic acid tris (p-tert-butoxyphenyl) sulfonium, nonafluorobutanesulfonic acid triphenylsulfonium, butane Sulfonic acid triphenylsulfonium, trifluoromethanesulfonic acid trimethylsulfonium, p-toluenesulfonic acid trimethyl Sulfonium, trifluoromethanesulfonic acid cyclohexylmethyl (2-oxocyclohexyl) sulfonium, p-toluenesulfonic acid cyclohexylmethyl (2-oxocyclohexyl) sulfonium, trifluoromethanesulfonic acid dimethylphenylsulfonium, p- Toluenesulfonic acid dimethylphenylsulfonium, trifluoromethanesulfonic acid dicyclohexylphenylsulfonium, p-toluenesulfonic acid dicyclohexylphenylsulfonium, trifluoromethanesulfonic acid trinaphthylsulfonium, trifluoromethanesulfonic acid cyclohexylmethyl (2 Oxocyclohexyl) sulfonium, trifluoromethanesulfonic acid (2-norbornyl) methyl (2-oxocyclohexyl) sulfonium, ethylenebis [methyl (2-oxocyclopentyl) sulfonium trifluoromethanesulfonate] Onium salts such as 1,2'-naphthylcarbonylmethyl tetrahydrothiophenium triplate, bis (benzenesulfonyl) diazomethane, bis (p-toluenesulfonyl) diazomethane, bis (xylenesulfonyl Diazomethane, bis (cyclohex) Silsulfonyl) diazomethane, bis (cyclopentylsulfonyl) diazomethane, bis (n-butylsulfonyl) diazomethane, bis (isobutylsulfonyl) diazomethane, bis (sec-butylsulfonyl) dia Crude methane, bis (n-propylsulfonyl) diazomethane, bis (isopropylsulfonyl) diazomethane, bis (tert-butylsulfonyl) diazomethane, bis (n-amylsulfonyl) diazomethane, Bis (isoamylsulfonyl) diazomethane, bis (sec-amylsulfonyl) diazomethane, bis (tert-amylsulfonyl) diazomethane, 1-cyclohexylsulfonyl-1- (tert-butylsulfonyl Diazomethane, such as diazomethane, 1-cyclohexylsulfonyl-1- (tert-amylsulfonyl) diazomethane, and 1-tert-amylsulfonyl-1- (tert-butylsulfonyl) diazomethane Derivatives, bis-O- (p-toluenesulfonyl) -α-dimethylglyoxime, bis-O- (p-toluenesulfonyl) -α-diphenylglyoxime, bis-O- (p-toluenesulfonyl) -α-dicyclohexylglyoxime, bis-O- (p-toluenesulfonyl) -2,3-pentanedionegly Shim, bis-O- (p-toluenesulfonyl) -2-methyl-3,4-pentanedioneglyoxime, bis-O- (n-butanesulfonyl) -α-dimethylglyoxime, bis-O- ( n-butanesulfonyl) -α-diphenylglyoxime, bis-O- (n-butanesulfonyl) -α-dicyclohexylglyoxime, bis-O- (n-butanesulfonyl) -2,3- Pentanedionoglyoxime, bis-O- (n-butanesulfonyl) -2-methyl-3,4-pentanedioneglyoxime, bis-O- (methanesulfonyl) -α-dimethylglyoxime, bis-O- (Trifluoromethanesulfonyl) -α-dimethylglyoxime, bis-O- (1,1,1-trifluoroethanesulfonyl) -α-dimethylglyoxime, bis-O- (tert-butanesulfonyl ) -α-dimethylglyoxime, bis-O- (perfluorooctanesulfonyl) -α-dimethylglyoxime, bis-O- (cyclohexanesulfonyl) -α-dimethylglyoxime, bis-O- (benzene Sulfonyl) -α-dimethylglyoxime, bis-O- (p-fluorobenzenesulfonyl) -α-dimethylglyoxime, bis-O- (p-tert-butylbenzenesulfonyl) -α-dimethylglyoxime , Bis-O- (xylenesulfonyl) -α-dimethyl Glyoxime derivatives such as lyoxime, bis-O- (campasulfonyl) -α-dimethylglyoxime, bisnaphthylsulfonylmethane, bistrifluoromethylsulfonylmethane, bismethylsulfonylmethane, bisethylsulfonylmethane , Bissulfon derivatives such as bispropylsulfonylmethane, bisisopropylsulfonylmethane, bis-p-toluenesulfonylmethane and bisbenzenesulfonylmethane, 2-cyclohexylcarbonyl-2- (p-toluenesulfonyl) Β-ketosulfone derivatives such as propane and 2-isopropylcarbonyl-2- (p-toluenesulfonyl) propane, disulfone derivatives such as diphenyldisulfone and dicyclohexyl disulfone, p-toluenesulfonic acid 2,6 -Nitrobenzylsulfonate derivatives such as dinitrobenzyl and p-toluenesulfonic acid 2,4-dinitrobenzyl, 1,2,3-tris (methanesulfonyloxy) benzene, 1,2,3-tris (trifluoro Sulfonic acid ester derivatives such as methanesulfonyloxy) benzene, 1,2,3-tris (p-toluenesulfonyloxy) benzene, and N-hydroxysuccinate De-methanesulfonic acid ester, N-hydroxysuccinimide trifluoromethanesulfonic acid ester, N-hydroxysuccinimide ethanesulfonic acid ester, N-hydroxysuccinimide-1-propanesulfonic acid ester, N-hydroxysuccinate Mid-2-propanesulfonic acid ester, N-hydroxysuccinimide-1-pentanesulfonic acid ester, N-hydroxysuccinimide-1-octanesulfonic acid ester, N-hydroxysuccinimide-p-toluenesulfonic acid ester, N-hydroxysuccinimide-p-methoxybenzenesulfonic acid ester, N-hydroxysuccinimide-2-chloroethanesulfonic acid ester, N-hydroxysuccinimide benzenesulfonic acid ester, N-hydroxysuccinimide- 2,4,6-trimethylbenzenesulfonic acid ester, N-hydroxysuccinimide-1-naphthalenesulfonic acid ester, N-hydroxysuccinimide-2-naphthalenesulfonic acid ester, N-hydroxy-2-phenylsuccinimide Methanesulfonic acid ester, N-hydroxymale Mid methanesulfonic acid ester, N-hydroxymaleimide ethanesulfonic acid ester, N-hydroxy-2-phenylmaleimide methanesulfonic acid ester, N-hydroxyglutalimide methanesulfonic acid ester, N-hydroxyglutalimide benzene Sulfonic acid ester, N-hydroxyphthalimide methanesulfonic acid ester, N-hydroxyphthalimide benzenesulfonic acid ester, N-hydroxyphthalimide trifluoromethanesulfonic acid ester, N-hydroxyphthalimide-p-toluene Sulfonic acid ester, N-hydroxynaphthalimide methanesulfonic acid ester, N-hydroxynaphthalimide benzenesulfonic acid ester, N-hydroxy-5-norbornene-2,3-dicarboxyimide methanesulfonic acid ester, N -Hydroxy-5-norbornene-2,3-dicarboxyimide trifluoromethanesulfonic acid ester, N-hydroxy-5-norbornene-2,3-dicarboxyimide-p-toluenesulfonic acid ester N-hydroxy Sulfonic acid ester derivatives of imide compounds and the like, but trifluoromethanesulfonic acid triphenylsulfonium, trifluoromethanesulfonic acid (p-tert-butoxyphenyl) diphenylsulfonium, trifluoromethanesulfonic acid tris (p) -tert-butoxyphenyl) sulfonium, p-toluenesulfonic acid triphenylsulfonium, p-toluenesulfonic acid (p-tert-butoxyphenyl) diphenylsulfonium, p-toluenesulfonic acid tris (p-tert-butoxyphenyl Sulfonium, trifluoromethanesulfonic acid trinaphthylsulfonium, trifluoromethanesulfonic acid cyclohexylmethyl (2-oxocyclohexyl) sulfonium, trifluoromethanesulfonic acid (2-norbornyl) methyl (2-oxocyclohexyl Onium salts such as sulfonium and 1,2'-naphthylcarbonylmethyl tetrahydrothiophenium triplate, bis (benzenesulfonyl) diazomethane, bis (p-toluenesulfonyl) diazomethane and bis ( Cyclohexylsulfonyl) diazomethane, bis (n-butylsulfonyl) diazomethane, bis ( Butylsulfonyl) diazomethane, bis (sec-butylsulfonyl) diazomethane, bis (n-propylsulfonyl) diazomethane, bis (isopropylsulfonyl) diazomethane, bis (tert-butylsulfonyl Glyoximes such as diazomethane derivatives such as diazomethane, bis-O- (p-toluenesulfonyl) -α-dimethylglyoxime, and bis-O- (n-butanesulfonyl) -α-dimethylglyoxime Derivatives, bissulfone derivatives such as bisnaphthylsulfonylmethane, N-hydroxysuccinimide methanesulfonic acid ester, N-hydroxysuccinimide trifluoromethanesulfonic acid ester, N-hydroxysuccinimide-1-propanesulfonic acid Ester, N-hydroxysuccinimide-2-propanesulfonic acid ester, N-hydroxysuccinimide-1-pentanesulfonic acid ester, N-hydroxysuccinimide-p-toluenesulfonic acid ester, N-hydroxynaphthal N-hydroxys, such as imide methanesulfonic acid ester and N-hydroxy naphthalimide benzene sulfonic acid ester Sulfonate ester derivatives of the mid compound are preferably used. In addition, the said acid generator can be used individually by 1 type or in combination of 2 or more type. Since the onium salt is excellent in the rectangularity improvement effect, and the diazomethane derivative and the glyoxime derivative are excellent in standing wave reduction effect, fine adjustment of a profile can be performed by combining both.
[123] The addition amount of the acid generator is preferably 0.1 to 15 parts, more preferably 0.5 to 8 parts with respect to 100 parts by weight of the base resin (parts by weight, hereinafter the same). When less than 0.1 part, a sensitivity may be bad, and when more than 15 parts, transparency may become low and resolution may fall.
[124] The organic solvent used in the present invention may be any organic solvent capable of dissolving a base resin, an acid generator, and other additives. As such an organic solvent, for example, ketones such as cyclohexanone and methyl-2-n-amyl ketone, 3-methoxybutanol, 3-methyl-3-methoxybutanol, 1-methoxy-2-propanol, and 1- Alcohols such as ethoxy-2-propanol, propylene glycol monomethyl ether, ethylene glycol monomethyl ether, propylene glycol monoethyl ether, ethylene glycol monoethyl ether, propylene glycol dimethyl ether, diethylene glycol dimethyl ether and the like, propylene Glycol monomethyl ether acetate, propylene glycol monoethyl ether acetate, ethyl lactate, ethyl pyruvate, butyl acetate, methyl 3-methoxypropionate, ethyl 3-ethoxypropionate, tert-butyl acetate, tert-butyl propionate, propylene glycol mono- and esters such as tert-butyl ether acetate, and one of these may be used alone or in combination of two or more thereof. It is, but not limited to these. In the present invention, among these organic solvents, propylene glycol monomethyl ether acetate, which is a safety solvent, and a mixed solvent thereof are preferably used, in addition to diethylene glycol dimethyl ether or 1-ethoxy-2-propanol, which have the best acid solubility in the resist component. .
[125] The use amount of the organic solvent is suitably 200 to 1,000 parts, particularly 400 to 800 parts, based on 100 parts of the base resin.
[126] To the resist material of the present invention, a polymer compound separate from the polymer compound including the units represented by Formulas 1 and 2 may be added.
[127] Specific examples of the polymer compound include, but are not limited to, those having a weight average molecular weight of 1,000 to 500,000, preferably 5,000 to 100,000, represented by the following general formula R1 and / or the following general formula R2.
[128]
[129] In the formula, R ⁰⁰¹ represents a hydrogen atom, a methyl group or CH ₂ CO ₂ R ⁰⁰³ , R ⁰⁰² represents a hydrogen atom, a methyl group or CO ₂ R ⁰⁰³ , R ⁰⁰³ is a straight, branched or cyclic having 1 to 15 carbon atoms ^Represents an alkyl group, R ⁰⁰⁴ represents a hydrogen atom or a monovalent hydrocarbon group containing a carboxyl group or a hydroxyl group having 1 to 15 carbon atoms, and at least one of R ⁰⁰⁵ to R ⁰⁰⁸ contains 1 a carboxyl group or hydroxyl group having 1 to 15 carbon atoms A hydrocarbon group, and the rest each independently represent a hydrogen atom or a linear, branched or cyclic alkyl group having 1 to 15 carbon atoms, and R ⁰⁰⁵ to R ⁰⁰⁸ may form a ring with each other, in which case R ⁰⁰⁵ to R at least one of ⁰⁰⁸ represents a divalent hydrocarbon group containing a carboxyl or hydroxyl group having 1 to 15 carbon atoms, and the other is a single bond or C 1 are each independently within the 15 represents a straight, branched or cyclic alkylene group of a, -CO ₂ R ⁰⁰⁹ has a carbon number of 3 to 15 - represents a monovalent hydrocarbon-containing partial structure, R ⁰¹⁰ to R ⁰¹³ is one or more of the carbon atoms 2 Monovalent hydrocarbon groups containing a -CO ₂ -partial structure of from 15 to 15, each independently represent a hydrogen atom or a linear, branched or cyclic alkyl group having 1 to 15 carbon atoms, and R ⁰¹⁰ to R ⁰¹³ are each other It may form a ring, in which case at least one of R ⁰¹⁰ to R ⁰¹³ represents a divalent hydrocarbon group containing a -CO ₂ -partial structure having 1 to 15 carbon atoms, and the rest are each independently a single bond or 1 to C carbon atoms. A linear, branched or cyclic alkylene group of 15, R ⁰¹⁴ represents an alkyl group containing a polycyclic hydrocarbon group or a polycyclic hydrocarbon group having 7 to 15 carbon atoms, and R ⁰¹⁵ is an acid labile R ⁰¹⁶ represents a hydrogen atom or a methyl group, R ⁰¹⁷ represents a linear, branched or cyclic alkyl group having 1 to 8 carbon atoms, k 'is 0 or 1, and a1', a2 ', a3' , b1 ', b2', b3 ', c1', c2 ', c3', d1 ', d2', d3 ', e' is 0 or more and less than 1, and a1 '+ a2' + a3 '+ b1' + b2 '+ b3' + c1 '+ c2' + c3 '+ d1' + d2 '+ d3' + e '= 1 is satisfied and f', g ', h', i ', and j' are greater than or equal to 0 It is a number less than 1, and satisfies f '+ g' + h '+ i' + j '= 1.
[130] In addition, about the specific example of each group, it is the same as that demonstrated in R <^1> -R <^20> .
[131] The blending ratio of the polymer compound including the units represented by Formulas 1 and 2 and the other polymer compound is preferably in the weight ratio range of 10:90 to 90:10, particularly 20:80 to 80:20. When the compounding ratio of the high molecular compound containing the repeating unit represented by the said Formula (1) and (2) is smaller than this, the performance which is preferable as a resist material may not be obtained. The performance of a resist material can be adjusted by suitably changing the said compounding ratio.
[132] In addition, the said high molecular compound is not limited to 1 type, It can add 2 or more types. By using a plurality of high molecular compounds, the performance of the resist material can be adjusted.
[133] The dissolution control agent can be further added to the resist material of the present invention. As the dissolution control agent, the average molecular weight is 100 to 1,000, preferably 150 to 800, and at the same time, the hydrogen atom of the phenolic hydroxyl group of the compound containing two or more phenolic hydroxyl groups in the molecule is averaged from 0 to 100 as an acid labile group. The compound which substituted the hydrogen atom of the said carboxyl group of the compound containing the carboxyl group in the compound or the molecule | numerator substituted by the mol% ratio in the ratio of 50-100 mol% on average by the acid labile group is mix | blended.
[134] In addition, the substitution rate by the acid labile group of the phenolic hydroxyl group hydrogen atom is 0 mol% or more, preferably 30 mol% or more of the whole phenolic hydroxyl group on average, The upper limit is 100 mol%, More preferably, it is 80 mol%. . The substitution rate of an acid labile group of a carboxyl hydrogen atom is 50 mol% or more, preferably 70 mol% or more of the whole carboxyl group on average, and the upper limit is 100 mol%.
[135] In this case, as a compound containing two or more such phenolic hydroxyl groups, or the compound containing a carboxyl group, what is represented by following formula (D1)-D14 is preferable.
[136]
[137] Provided that R ²⁰¹ and R ²⁰² each represent a hydrogen atom or a linear or branched alkyl or alkenyl group having 1 to 8 carbon atoms, and R ²⁰³ represents a hydrogen atom or a straight or branched carbon group having 1 to 8 carbon atoms Alkyl group or alkenyl group or-(R ²⁰⁷ ) _h COOH, R ²⁰⁴ is-(CH ₂ ) _i- (i = 2 to 10), arylene group having 6 to 10 carbon atoms, carbonyl group, sulfonyl group, oxygen atom Or a sulfur atom, R ²⁰⁵ represents an alkylene group having 1 to 10 carbon atoms, an arylene group having 6 to 10 carbon atoms, a carbonyl group, a sulfonyl group, an oxygen atom, or a sulfur atom, and R ²⁰⁶ represents a hydrogen atom, a carbon group having 1 to 8 carbon atoms A linear or branched alkyl group, an alkenyl group, or a phenyl group or a naphthyl group substituted with a hydroxyl group, respectively, R ²⁰⁷ represents a linear or branched alkylene group having 1 to 10 carbon atoms, and R ²⁰⁸ represents a hydrogen atom or a hydroxyl group J is 0 to Is an integer of 5, u, h is 0 or 1, and s, t, s ', t', s '', t '' are s + t = 8, s '+ t' = 5, s '' respectively It is a number which satisfy | fills + t "= 4, and simultaneously has one or more hydroxyl groups in each phenyl frame | skeleton, (alpha) is a number which makes the molecular weight of a compound of general formula D8, D9 into 100-1,000.
[138] In the above formula, as R ²⁰¹ and R ^202, for example, a hydrogen atom, a methyl group, an ethyl group, a butyl group, a propyl group, an ethynyl group, a cyclohexyl group, and as R ^203, for example, the same as R ²⁰¹ and R ²⁰² , or -COOH , As —CH ₂ COOH, R ^204, for example, an ethylene group, a phenylene group, a carbonyl group, a sulfonyl group, an oxygen atom, a sulfur atom, etc., as R ^205, for example, the same as a methylene group or R ^204, and as R ^206, for example Examples thereof include a hydrogen atom, a methyl group, an ethyl group, a butyl group, a propyl group, an ethynyl group, a cyclohexyl group, a phenyl group substituted with a hydroxyl group, and a naphthyl group.
[139] Here, as an acid labile group of a dissolution control agent, the group represented by the following general formula L1-L4, the C4-C20 tertiary alkyl group, the C1-C6 trialkylsilyl group of each alkyl group, and the C4-C20 oxo Alkyl group etc. are mentioned.
[140]
[141] In formula, R <^L01> , R <^L02> represents a hydrogen atom or a C1-C18 linear, branched, or cyclic alkyl group, R <^L03> monovalent which may contain hetero atoms, such as a C1-C18 oxygen atom, etc. ^{Represents a} hydrocarbon group, and R ^L01 and R ^L02 , R ^L01 and R ^L03 , R ^L02 and R ^L03 may form a ring, and when forming a ring, R ^L01 , R ^L02 and R ^L03 each have a carbon number of 1 to 18 carbon atoms. A chain or branched alkylene group, R ^L04 is a C4-C20 tertiary alkyl group, each alkyl group is a trialkylsilyl group having 1 to 6 carbon atoms, an oxoalkyl group having 4 to 20 carbon atoms, or the above formula (L1) R ^L05 represents a linear, branched or cyclic alkyl group having 1 to 8 carbon atoms or an aryl group which may be substituted with 6 to 20 carbon atoms, and R ^L06 represents a straight, branched or cyclic group having 1 to 8 carbon atoms. Alkyl group or Aryl group which may be substituted with a small number of 6 to 20, R ^L07 to R ^L16 each independently represents a monovalent hydrocarbon group which also can include a hydrogen atom or a hetero atom having 1 to 15, R ^L07 to R ^L16 are each It may form a ring, in which case represents a divalent hydrocarbon group which may contain a hetero atom having 1 to 15 carbon atoms, and R ^L07 to R ^L16 may be bonded directly to the adjacent carbon to form a double bond And y is an integer of 0 to 6, m is 0 or 1, n is any one of 0, 1, 2, and 3, and is a number satisfying 2m + n = 2 or 3.
[142] The compounding quantity of the said dissolution control agent is 0-50 parts with respect to 100 parts of base resins, Preferably it is 5-50 parts, More preferably, it is 10-30 parts, It can use individually or in mixture of 2 or more types. If the blending amount is less than 5 parts, the resolution may not be improved. If the blending amount is more than 50 parts, the film may be reduced in pattern and the resolution may decrease.
[143] In addition, the dissolution control agent as described above is synthesized by introducing an acid labile group to the compound containing a phenolic hydroxyl group or carboxyl group using an organic chemical method.
[144] In addition, a basic compound can be mix | blended with the resist material of this invention.
[145] As a basic compound, the compound which can suppress the diffusion rate at the time of the acid which generate | occur | produces from an acid generator to a resist film is suitable. By compounding the basic compound, the diffusion rate of the acid in the resist film is suppressed, so that the resolution can be improved, and the change in sensitivity after exposure can be suppressed, or the exposure margin and pattern profile can be improved by reducing the substrate and the environmental dependence.
[146] As such basic compounds, primary, secondary and tertiary aliphatic amines, hybrid amines, aromatic amines, heterocyclic amines, nitrogen-containing compounds containing carboxyl groups, nitrogen-containing compounds containing sulfonyl groups and nitrogen-containing compounds containing hydroxyl groups And nitrogen-containing compounds containing hydroxyphenyl groups, alcoholic nitrogen-containing compounds, amide derivatives, imide derivatives and the like.
[147] Specifically, as the primary aliphatic amines, ammonia, methylamine, ethylamine, n-propylamine, isopropylamine, n-butylamine, isobutylamine, sec-butylamine, tert-butylamine, pentylamine, tert- Amylamine, cyclopentylamine, hexylamine, cyclohexylamine, heptylamine, octylamine, nonylamine, decylamine, dodecylamine, cetylamine, methylenediamine, ethylenediamine, tetraethylenepentamine and the like are exemplified, and secondary As aliphatic amines of dimethylamine, diethylamine, di-n-propylamine, diisopropylamine, di-n-butylamine, diisobutylamine, di-sec-butylamine, dipentylamine, dicyclopentylamine , Dihexylamine, dicyclohexylamine, diheptylamine, dioctylamine, dinonylamine, didecylamine, didodecylamine, dicetylamine, N, N-dimethylmethylenediamine, N, N-dimethylethylenediamine, N, N-dimethyl tetraethylene pentamine and the like are exemplified, tertiary aliphatic Trimethylamine, triethylamine, tri-n-propylamine, triisopropylamine, tri-n-butylamine, triisobutylamine, tri-sec-butylamine, tripentylamine, tricyclopentylamine, tri Hexylamine, tricyclohexylamine, triheptylamine, trioctylamine, trinonylamine, tridecylamine, tridodecylamine, tricetylamine, N, N, N ', N'-tetramethylmethylenediamine, N, N, N ', N'-tetramethylethylenediamine, N, N, N', N'-tetramethyltetraethylenepentamine, etc. are illustrated.
[148] In addition, examples of the mixed amines include dimethylethylamine, methylethylpropylamine, benzylamine, phenethylamine, benzyldimethylamine, and the like. Specific examples of the aromatic amines and heterocyclic amines include aniline derivatives (for example, aniline, N-methylaniline, N-ethylaniline, N-propylaniline, N, N-dimethylaniline, 2-methylaniline, 3-methylaniline, 4 -Methylaniline, ethylaniline, propylaniline, trimethylaniline, 2-nitroaniline, 3-nitroaniline, 4-nitroaniline, 2,4-dinitroaniline, 2,6-dinitroaniline, 3,5-dinitro Aniline, N, N-dimethyltoluidine, etc.), diphenyl (p-tolyl) amine, methyldiphenylamine, triphenylamine, phenylenediamine, naphthylamine, diaminonaphthalene, pyrrole derivatives (e.g. pyrrole, 2H -Pyrrole, 1-methylpyrrole, 2,4-dimethylpyrrole, 2,5-dimethylpyrrole, N-methylpyrrole, etc.), oxazole derivatives (e.g. oxazole, isoxazole, etc.), thiazole derivatives (e.g. Thiazole, isothiazole, etc.), imidazole derivatives (e.g., imidazole, 4-methylimidazole, 4-methyl-2-phenylimidazole, etc.), p Lazole derivatives, furazane derivatives, pyrroline derivatives (e.g. pyrroline, 2-methyl-1-pyrroline, etc.), pyrrolidine derivatives (e.g. pyrrolidine, N-methylpyrrolidine, pyrrolidinone , N-methylpyrrolidone, etc.), imidazoline derivatives, imidazolidine derivatives, pyridine derivatives (e.g. pyridine, methylpyridine, ethylpyridine, propylpyridine, butylpyridine, 4- (1-butylpentyl) pyridine , Dimethylpyridine, trimethylpyridine, triethylpyridine, phenylpyridine, 3-methyl-2-phenylpyridine, 4-tert-butylpyridine, diphenylpyridine, benzylpyridine, methoxypyridine, butoxypyridine, dimethoxypyridine, 1 -Methyl-2-pyridine, 4-pyrrolidinopyridine, 1-methyl-4-phenylpyridine, 2- (1-ethylpropyl) pyridine, aminopyridine, dimethylaminopyridine and the like), pyridazine derivatives, pyrimidine derivatives, Pyrazine derivatives, pyrazoline derivatives, pyrazolidine derivatives, piperidine derivatives, piperazine derivatives, mother Lepoline derivatives, indole derivatives, isoindole derivatives, 1H-indazole derivatives, indolin derivatives, quinoline derivatives (e.g. quinoline, 3-quinolinecarbonitrile, etc.), isoquinoline derivatives, cinnoline derivatives, quinazoline derivatives, quinox Saline derivatives, phthalazine derivatives, purine derivatives, pteridine derivatives, carbazole derivatives, phenanthridine derivatives, acridine derivatives, phenadine derivatives, 1,10-phenanthroline derivatives, adenine derivatives, adenosine derivatives, guanine Derivatives, guanosine derivatives, uracil derivatives, uridine derivatives and the like.
[149] As the nitrogen-containing compound containing a carboxyl group, for example, aminobenzoic acid, indolecarboxylic acid, and amino acid derivatives (for example, nicotinic acid, alanine, arginine, aspartic acid, glutamic acid, glycine, histidine, isoleucine, glycylosin, leucine , Methylonine, phenylalanine, threonine, lysine, 3-aminopyrazine-2-carboxylic acid, methoxyalanine and the like), and the like, and a pyridine sulfonic acid, p-toluenesulfonic acid pyri as a nitrogen-containing compound containing a sulfonyl group Dinium etc. are illustrated, As a nitrogen containing compound containing a hydroxyl group, The nitrogen containing compound containing a hydroxyphenyl group, and an alcoholic nitrogen containing compound, 2-hydroxypyridine, an aminocresol, 2, 4- quinolinediol, 3- indolmethanol hydroxide Rate, monoethanolamine, diethanolamine, triethanolamine, N-ethyl diethanolamine, N, N-diethylethanolamine, triisopropanol Min, 2,2'-iminodiethanol, 2-aminoethanol, 3-amino-1-propanol, 4-amino-1-butanol, 4- (2-hydroxyethyl) morpholine, 2- (2-hydric Hydroxyethyl) pyridine, 1- (2-hydroxyethyl) piperazine, 1- [2- (2-hydroxyethoxy) ethyl] piperazine, piperidineethanol, 1- (2-hydroxyethyl) pi Lolidine, 1- (2-hydroxyethyl) -2-pyrrolidinone, 3-piperidino-1,2-propanediol, 3-pyrrolidino-1,2-propanediol, 8-hydroxy oil Lolidine, 3-quinuclidinol, 3-tropanol, 1-methyl-2-pyrrolidineethanol, 1-aziridineethanol, N- (2-hydroxyethyl) phthalimide, N- (2-hydroxy Oxyethyl) isonicotinamide, etc. are illustrated. Examples of the amide derivatives include formamide, N-methylformamide, N, N-dimethylformamide, acetamide, N-methylacetamide, N, N-dimethylacetamide, propionamide, benzamide and the like. Phthalimide, succinimide, maleimide, etc. are illustrated as an imide derivative.
[150] Moreover, 1 type, or 2 or more types chosen from the basic compound represented by following formula (B1) can also be mix | blended.
[151] N (X) _n (Y) _3-n B1
[152] In formula, n = 1, 2 or 3, Y respectively independently represents a hydrogen atom or a linear, branched or cyclic alkyl group of 1 to 20 carbon atoms, and may include a hydroxy group or an ether, and each X is independently The group represented by the following general formulas (X1 to X3) may be represented, and two or three Xs may combine to form a ring.
[153]
[154] Wherein R ³⁰⁰ , R ³⁰² and R ³⁰⁵ represent a linear or branched alkylene group having 1 to 4 carbon atoms, and R ³⁰¹ and R ³⁰⁴ represent a hydrogen atom or a linear, branched or cyclic group having 1 to 20 carbon atoms. An alkyl group is shown, One or several hydroxyl group, an ether, an ester, or a lactone ring may be included, and R ³⁰³ represents a single bond or a linear or branched alkylene group having 1 to 4 carbon atoms.
[155] Specific examples of the compound represented by the formula (B1) include tris (2-methoxymethoxyethyl) amine, tris {2- (2-methoxyethoxy) ethyl} amine, tris {2- (2-methoxyethoxy Methoxy) ethyl} amine, tris {2- (1-methoxyethoxy) ethyl} amine, tris {2- (1-ethoxyethoxy) ethyl} amine, tris {2- (1-ethoxypropoxy ) Ethyl} amine, tris [2- {2- (2-hydroxyethoxy) ethoxy} ethyl] amine, 4,7,13,16,21,24-hexaoxa-1,10-diazabicyclo [ 8.8.8] hexacoic acid, 4,7,13,18-tetraoxa-1,10-diazabicyclo [8.5.5] eichoic acid, 1,4,10,13-tetraoxa-7,16-diazabi Cyclooctadecane, 1-aza-12-crown-4, 1-aza-15-crown-5, 1-aza-18-crown-6, tris (2-formyloxyethyl) amine, tris (2-form Miloxyethyl) amine, tris (2-acetoxyethyl) amine, tris (2-propionyloxyethyl) amine, tris (2-butyryloxyethyl) amine, tris (2-isobutyryloxyethyl) amine, tree (2-valeryloxyethyl) amine, tris (2-pivaloyloxyethyl) amine, N, N-bis (2-acetoxyethyl) 2- (acetoxyacetoxy) ethylamine, tris (2-meth Oxycarbonyloxyethyl) amine, tris (2-tert-butoxycarbonyloxyethyl) amine, tris [2- (2-oxopropoxy) ethyl] amine, tris [2- (methoxycarbonylmethyl) oxy Ethyl] amine, tris [2- (tert-butoxycarbonylmethyloxy) ethyl] amine, tris [2- (cyclohexyloxycarbonylmethyloxy) ethyl] amine, tris (2-methoxycarbonylethyl) Amine, tris (2-ethoxycarbonylethyl) amine, N, N-bis (2-hydroxyethyl) 2- (methoxycarbonyl) ethylamine, N, N-bis (2-acetoxyethyl) 2 -(Methoxycarbonyl) ethylamine, N, N-bis (2-hydroxyethyl) 2- (ethoxycarbonyl) ethylamine, N, N-bis (2-acetoxyethyl) 2- (ethoxy Carbonyl) ethylamine, N, N-bis (2-hydroxyethyl) 2- (2-methoxyethoxycarbonyl) ethylamine, N, N-bis (2- Acetoxyethyl) 2- (2-methoxyethoxycarbonyl) ethylamine, N, N-bis (2-hydroxyethyl) 2- (2-hydroxyethoxycarbonyl) ethylamine, N, N- Bis (2-acetoxyethyl) 2- (2-acetoxyethoxycarbonyl) ethylamine, N, N-bis (2-hydroxyethyl) 2-[(methoxycarbonyl) methoxycarbonyl] ethyl Amine, N, N-bis (2-acetoxyethyl) 2-[(methoxycarbonyl) methoxycarbonyl] ethylamine, N, N-bis (2-hydroxyethyl) 2- (2-oxopro Foxoxycarbonyl) ethylamine, N, N-bis (2-acetoxyethyl) 2- (2-oxopropoxycarbonyl) ethylamine, N, N-bis (2-hydroxyethyl) 2- (tetrahydro Furfuryloxycarbonyl) ethylamine, N, N-bis (2-acetoxyethyl) 2- (tetrahydrofurfuryloxycarbonyl) ethylamine, N, N-bis (2-hydroxyethyl) 2- [ (2-oxotetrahydrofuran-3-yl) oxycarbonyl] ethylamine, N, N-bis (2-acetoxyethyl) 2-[(2-oxotetrahydrofuran-3-yl) oxycarbo ] Ethylamine, N, N-bis (2-hydroxyethyl) 2- (4-hydroxybutoxycarbonyl) ethylamine, N, N-bis (2-formyloxyethyl) 2- (4-form Miloxybutoxycarbonyl) ethylamine, N, N-bis (2-formyloxyethyl) 2- (2-formyloxyethoxycarbonyl) ethylamine, N, N-bis (2-methoxyethyl ) 2- (methoxycarbonyl) ethylamine, N- (2-hydroxyethyl) bis [2- (methoxycarbonyl) ethyl] amine, N- (2-acetoxyethyl) bis [2- (meth Oxycarbonyl) ethyl] amine, N- (2-hydroxyethyl) bis [2- (ethoxycarbonyl) ethyl] amine, N- (2-acetoxyethyl) bis [2- (ethoxycarbonyl) Ethyl] amine, N- (3-hydroxy-1-propyl) bis [2- (methoxycarbonyl) ethyl] amine, N- (3-acetoxy-1-propyl) bis [2- (methoxycar Carbonyl) ethyl] amine, N- (2-methoxyethyl) bis [2- (methoxycarbonyl) ethyl] amine, N-butylbis [2- (methoxycarbonyl) ethyl] amine, N-butylbis [2- (2-methoxyethoxycarbonyl) ethyl] amine, N-methylbis (2- Cethoxyethyl) amine, N-ethylbis (2-acetoxyethyl) amine, N-methylbis (2-pivaloyloxyethyl) amine, N-ethylbis [2- (methoxycarbonyloxy) ethyl] Amine, N-ethylbis [2- (tert-butoxycarbonyloxy) ethyl] amine, tris (methoxycarbonylmethyl) amine, tris (ethoxycarbonylmethyl) amine, N-butylbis (methoxycarbon Carbonyl methyl) amine, N-hexylbis (methoxycarbonylmethyl) amine, (beta)-(diethylamino) -delta-valerolactone, etc. can be illustrated.
[156] The compounding quantity of the said basic compound is 0.001-10 parts with respect to 1 part of acid generators, Preferably it is 0.01-1 part. When the compounding quantity is less than 0.001 part, the effect as an additive may not be fully acquired, and when it exceeds 10 parts, resolution and a sensitivity may fall.
[157] Moreover, the compound containing the group represented by -C-COOH can be mix | blended with the resist material of this invention in a molecule | numerator.
[158] As a compound containing group represented by -C-COOH in a molecule | numerator, 1 type (s) or 2 or more types of compounds chosen from the following group I and II can be used, for example, It is not limited to these. This component formulation improves the PED stability of the resist and improves the edge roughness on the nitride film substrate.
[159] [Group I]
[160] Some or all of the hydrogen atoms of the phenolic hydroxyl groups of the compounds represented by formulas A1 to A10 are substituted by -R ⁴⁰¹ -COOH (R ⁴⁰¹ is a linear or branched alkylene group having 1 to 10 carbon atoms); And at the same time the molar ratio between the phenolic hydroxyl group (C) in the molecule and the group (D) represented by ≡C-COOH is C / (C + D) = 0.1 to 1.0.
[161]
[162] Provided that R ⁴⁰⁸ represents a hydrogen atom or a methyl group, R ⁴⁰² and R ⁴⁰³ each represent a hydrogen atom or a linear or branched alkyl or alkenyl group having 1 to 8 carbon atoms, and R ⁴⁰⁴ represents a hydrogen atom or 1 carbon atom A straight or branched alkyl group or alkenyl group of 8 to 8, or a-(R ⁴⁰⁹ ) h-COOR 'group (R' represents a hydrogen atom or -R ⁴⁰⁹ -COOH), and R ⁴⁰⁵ represents-(CH ₂ ) i -(i = 2 to 10), an arylene group having 6 to 10 carbon atoms, a carbonyl group, a sulfonyl group, an oxygen atom or a sulfur atom, and R ⁴⁰⁶ is an alkylene group having 1 to 10 carbon atoms, an arylene group having 6 to 10 carbon atoms, or a carbonyl group , A sulfonyl group, an oxygen atom or a sulfur atom, R ⁴⁰⁷ represents a hydrogen atom or a linear or branched alkyl group having 1 to 8 carbon atoms, an alkenyl group, a phenyl group or a naphthyl group substituted with a hydroxyl group, respectively, and R ⁴⁰⁹ is carbon number 1-10 linear or branched alkyl R ⁴¹⁰ represents a hydrogen atom or a linear or branched alkyl group or alkenyl group or a -R ⁴¹¹ -COOH group having 1 to 8 carbon atoms, and R ⁴¹¹ represents a linear or branched alkylene group having 1 to 10 carbon atoms Group, j is an integer from 0 to 5, u, h is 0 or 1, s1, t1, s2, t2, s3, t3, s4, t4 are s1 + t1 = 8, s2 + t2 = 5, satisfies s3 + t3 = 4 and s4 + t4 = 6 and at the same time has at least one hydroxyl group in each phenyl skeleton, κ is a number having a weight average molecular weight of 1,000 to 5,000, and λ is a formula The compound of A7 is a number which uses a weight average molecular weight 1,000-10,00.
[163] [Group II]
[164] Compounds represented by the following formulas A11 to A15.
[165]
[166] R ⁴⁰² , R ⁴⁰³ and R ⁴¹¹ represent the same meaning as described above, R ⁴¹² represents a hydrogen atom or a hydroxyl group, s5 and t5 are s5 ≧ 0, t5 ≧ 0, and a number satisfying s5 + t5 = 5, h 'is 0 or 1.
[167] Although the compound specifically, shown by following formula (AI-1-14) and AII-1-10 is mentioned as this component, It is not limited to these.
[168]
[169] R ″ represents a hydrogen atom or a CH ₂ COOH group, and in each compound, 10 to 100 mol% of R ″ is a CH ₂ COOH group, and α and κ have the same meaning as described above.
[170]
[171] In addition, the compound containing the group represented by -C-COOH in the said molecule can be used individually by 1 type or in combination of 2 or more types.
[172] The amount of the compound containing a group represented by ≡C-COOH in the molecule is 0 to 5 parts, preferably 0.1 to 5 parts, more preferably 0.1 to 3 parts, even more preferably 0.1 to 100 parts of the base resin. To 2 parts. When more than 5 parts, the resolution of a resist material may fall.
[173] Moreover, an acetylene alcohol derivative can be mix | blended with the resist material of this invention as an additive, and, thereby, storage stability can be improved.
[174] As the acetylene alcohol derivative, those represented by the following formulas S1 and S2 can be preferably used.
[175]
[176] In formula, R <^501> , R <^502> , R <^503> , R <^504> and R <^505> are a hydrogen atom or a C1-C8 linear, branched or cyclic alkyl group, respectively, X, Y represents 0 or a positive number, The values of 0 ≦ X ≦ 30, 0 ≦ Y ≦ 30, and 0 ≦ X + Y ≦ 40 are satisfied.
[177] As the acetylene alcohol derivative, preferably, quinolin 61, sufinol 82, sufinol 104, sufinol 104E, sufinol 104H, sufinol 104A, sufinol TG, sufinol PC, sufinol 440, sufinol 465, sufinol 485 (Manufactured by Air Products and Chemicals Inc.), Sufinol E1004 (manufactured by Nisshin Chemical Industries, Ltd.), and the like.
[178] The amount of the acetylene alcohol derivative added is 0.01 to 2% by weight, more preferably 0.02 to 1% by weight in 100% by weight of the resist material. When less than 0.01 weight%, the effect of improving coating property and storage stability may not be fully acquired, and when more than 2 weight%, the resolution of a resist material may fall.
[179] The resist material of this invention can add the surfactant normally used in order to improve applicability as an arbitrary component other than the said component. In addition, the addition amount of an arbitrary component can be made into the normal amount in the range which does not impair the effect of this invention.
[180] As the surfactant, nonionic ones are preferable, and perfluoroalkyl polyoxyethylene ethanol, fluorinated alkyl ester, perfluoroalkylamine oxide, perfluoroalkyl EO adduct, fluorine-containing organosiloxane compound and the like Can be mentioned. For example, fluoride "FC-430", "FC-431" (all are manufactured by Sumitomo 3M Co., Ltd.), suffrons "S-141", "S-145" (all are manufactured by Asahi Glass Co., Ltd.) ), "DS-401", "DS-403", "DS-451" (all manufactured by Daikin Kogyo Co., Ltd.), Megapack "F-8151" (manufactured by Dainippon Ink Kogyo Co., Ltd.), "X-70-092", "X-70-093" (all are the Shin-Etsu Chemical Co., Ltd. make), etc. are mentioned. Preferably, fluoride "FC-430" (made by Sumitomo 3M Corporation) and "X-70-093" (made by Shin-Etsu Chemical Co., Ltd.) are mentioned.
[181] In order to form a pattern using the resist material of the present invention, a well-known lithography technique may be employed and applied, for example, on a substrate such as a silicon wafer so as to have a film thickness of 0.3 to 2.0 μm by spin coating or the like. This is then prebaked on a hot plate at 60 to 150 ° C. for 1 to 10 minutes, preferably at 80 to 130 ° C. for 1 to 5 minutes. Subsequently, a mask for forming a desired pattern is covered on the resist film, and high-energy rays or electron beams such as far ultraviolet rays, excimer lasers, X-rays or the like are exposed at an exposure dose of about 1-200,000 mJ / cm 2, preferably 10-100,000 mJ /. After irradiation to about 2 cm 2, post exposure bake (PEB) is carried out on a hot plate at 60 to 150 ° C. for 1 to 5 minutes, preferably at 80 to 130 ° C. for 1 to 3 minutes. Subsequently, the dip method is performed for 0.1 to 3 minutes, preferably 0.5 to 2 minutes, using an aqueous alkali solution developer such as tetramethylammonium hydroxide (TMAH) at 0.1 to 5%, preferably 2 to 3%, The desired pattern is formed on a board | substrate by developing by normal methods, such as a puddle method and the spray method. In addition, the resist material of the present invention is particularly suitable for fine patterning by far ultraviolet rays or excimer lasers, X-rays and electron beams of 248 to 193 nm, even among high energy rays. In addition, when the said range deviates from an upper limit and a lower limit, a desired pattern may not be obtained.
[182] <Example>
[183] Hereinafter, the present invention will be described in detail with reference to synthesis examples and examples, but the present invention is not limited to the following examples.
[184] Synthesis Example
[185] The high molecular compound of this invention was synthesize | combined by the method shown below.
[186] Synthesis Example 1 Synthesis of Polymer 1
[187] 80.0 g of 3- (bicyclo [2.2.1] -2-hepten-5-yl) -3-acetoxypropionic acid 1-ethylcyclopentyl (bicyclo [2.2.1] -2-hepten-5-carbal After reacting dehydrate and acetic acid 1-ethylcyclopentyl in the presence of lithium hexamethyldisilazide, the resulting hydroxyl group was synthesized by acetylation) and 24.5 g of maleic anhydride were dissolved in 1 L of tetrahydrofuran, and 1.8 g of 2,2'-azobisisobutyronitrile was added. After stirring at 60 ° C. for 15 hours, the mixture was concentrated under reduced pressure. The obtained residue was dissolved in 40 ml of tetrahydrofuran and added dropwise to 10 L of n-hexane. The produced solid was collected by filtration, washed with an additional 10 L of n-hexane, and vacuum dried at 40 ° C. for 6 hours to obtain 59.5 g of a polymer compound represented by the following Polymer 1. The yield was 56.9%.
[188] The transmittance at a wavelength of 193 nm of this polymer compound was measured and found to be 78.0% at a thickness of 500 nm.
[189] Synthesis Examples 2 to 12 Synthesis of Polymers 2 to 12
[190] Polymers 2 to 12 were synthesized in the same manner as above or by known methods.
[191]
[192]
[193] Example I
[194] The resolution of KrF excimer laser exposure was evaluated for the resist material of the present invention.
[195] <Examples I-1 to 22> Evaluation of Resolution of Resist
[196] An acid generator (PAG 1, 2) represented by the following formula as a base resin, and a polymer represented by the above formula (polymer 1 to 12), a dissolution control agent (DRR 1 to 4) represented by the following formula, a basic compound In the molecule | numerator represented by following formula, the compound (ACC1, 2) containing the group represented by -C-COOH, and a solvent were mixed by the composition shown in Table 1. Subsequently, these were filtered through a filter made of Teflon (pore size 0.2 µm) to obtain a resist material.
[197]
[198]
[199]
[200] The resist solution was spin coated onto a silicon wafer and applied to a thickness of 0.5 μm. This silicon wafer was then baked at 110 ° C. for 90 seconds using a hot plate. This was exposed using a KrF excimer laser stepper (NA = 0.5, manufactured by Nikon Corporation), baked at 110 ° C. for 90 seconds (PEB), and developed with a 2.38% aqueous tetramethylammonium hydroxide solution to obtain a positive pattern. there was.
[201] Evaluation of the resist was performed on the following items. First, sensitivity (Eth, mJ / cm <2>) was calculated | required. Subsequently, the exposure dose for resolving 0.30 μm line and space in 1: 1 is set to the optimum exposure dose (Eop, mJ / cm 2), and the minimum line width (μm) of the line and space separated from the exposure dose is set to the resolution of the evaluation resist. It was. The shape of the resolved resist pattern was observed using a scanning electron microscope.
[202] Table 1 shows the composition and evaluation results of each resist. In addition, in Table 1, 2, the solvent and basic compound were as follows. In addition, the solvent used the thing containing 0.01 weight% of FC-430 (made by Sumitomo 3M Co., Ltd.).
[203] PGMEA: propylene glycol methyl ether acetate
[204] TBA: tributylamine
[205] TEA: Triethanolamine
[206] TMMEA: Trismethoxymethoxyethylamine
[207] TMEMEA: trismethoxyethoxymethoxyethylamine
[208]
[209] From the result of Table 1, it was confirmed that the resist material of this invention has high sensitivity and high resolution in KrF excimer laser exposure.
[210] Example II
[211] The resolution of ArF excimer laser exposure was evaluated for the resist material of the present invention.
[212] <Example II-1, 2> Resolution Evaluation of Resist
[213] The resist material was manufactured by the composition shown in Table 2 similarly to the above.
[214] The resist solution was spin coated onto a silicon wafer and applied to a thickness of 0.5 mu m. This silicon wafer was then baked at 110 ° C. for 90 seconds using a hot plate. This was exposed using an ArF excimer laser stepper (NA = 0.55), baked at 110 ° C. for 90 seconds (PEB), and developed with a 2.38% aqueous tetramethylammonium hydroxide solution to obtain a positive pattern. there was.
[215] Evaluation of the resist was performed on the following items. First, sensitivity (Eth, mJ / cm <2>) was calculated | required. Subsequently, the exposure amount for resolving the line and space of 0.25 μm to 1: 1 is set to the optimum exposure amount (Eop, mJ / cm 2), and the minimum line width (μm) of the line and space separated at this exposure amount is set to the resolution of the evaluation resist. It was. The shape of the resolved resist pattern was observed using a scanning electron microscope.
[216] The composition and evaluation results of each resist are shown in Table 2.
[217] ExampleSuzyAcid generatorDissolution control agentBasic compoundsolventOptimal exposureresolutionshape II-1Polymer 2 (80)PAG 2 (1) TEA (0.063)PGMEA (480)16.00.15Rectangle II-2Polymer 3 (70)PAG 2 (1)DRR 4 (10)TMMEA (0.118)PGMEA (480)15.00.15Rectangle
[218] From the results of Table 2, it was confirmed that the resist material of the present invention had high sensitivity and high resolution in ArF excimer laser exposure.
[219] The resist material using the polymer compound of the present invention as a base resin is useful for fine processing by electron beams or far ultraviolet rays because it is sensitive to high energy rays and excellent in sensitivity, resolution, and etching resistance. In particular, since absorption at the exposure wavelength of ArF excimer laser and KrF excimer laser is small, it has a characteristic that it is easy to form a pattern which is fine and perpendicular | vertical to a board | substrate.

权利要求:
Claims (5)
[1" claim-type="Currently amended] A polymer compound having a weight average molecular weight of 1,000 to 500,000, including a unit represented by the following formula (1) and (2).
<Formula 1>

<Formula 2>

Wherein, R ¹ is a hydrogen atom, a methyl group or ^{_{CH 2 CO 2 R 3, R}} 2 denotes a hydrogen atom, a methyl group or CO ₂ R ^3, R ³ is a straight, branched or cyclic having 1 to 15 carbon atoms R ⁴ represents a halogen atom or an acyloxy group having 1 to 15 carbon atoms, an alkoxycarbonyloxy group or an alkylsulfonyloxy group, and some or all of the hydrogen atoms on the constituent carbon atoms may be replaced by halogen atoms. R <^5> may represent a hydrogen atom or a C1-C10 linear, branched or cyclic alkyl group, R <^6> represents an acid labile group, Z is a single bond or C1-C10 linear, branched or A cyclic divalent hydrocarbon group, k is 0 or 1, W represents -O- or-(NR)-, and R represents a hydrogen atom or a linear, branched or cyclic alkyl group having 1 to 15 carbon atoms .
[2" claim-type="Currently amended] The polymer compound according to claim 1, wherein the unit represented by Chemical Formula 1 is a unit represented by the following Chemical Formula 3 or 4.
<Formula 3>

<Formula 4>

In formula, R <^1> -R <^5> , Z, k are the same as the above, R <^7> -R <^10> may respectively independently be a C1-C8 linear, branched or cyclic alkyl group, or C6-C20 may be substituted. Y represents an aryl group, and Y represents a divalent hydrocarbon group having 4 to 15 carbon atoms which may include a hetero atom, and together with the carbon atoms bonded at both ends, forms a ring.
[3" claim-type="Currently amended] The polymer compound according to claim 1 or 2, further comprising one or two or more of the units represented by the following Chemical Formulas 5 to 8.
<Formula 5>

<Formula 6>

<Formula 7>

<Formula 8>

In formula, R <^1> , R <^2> , k is the same as the above, One or more of R <^11> -R <^14> represents the monovalent hydrocarbon group containing a C1-C15 carboxy group or a hydroxyl group, and remainder each independently represents a hydrogen atom Or a linear, branched or cyclic alkyl group having 1 to 15 carbon atoms, and R ¹¹ to R ¹⁴ may form a ring with each other, in which case at least one of R ¹¹ to R ¹⁴ is a carboxy group having 1 to 15 carbon atoms. Or a divalent hydrocarbon group containing a hydroxyl group, the remainder each independently represents a single bond or a linear, branched or cyclic alkylene group having 1 to 15 carbon atoms, and at least one of R ¹⁵ to R ¹⁸ has 2 to C carbon atoms. 15 of -CO ₂ - represents a monovalent hydrocarbon group containing a partial structure and the remainder represent straight, branched or cyclic alkyl group, independently, a hydrogen atom or 1 to 15 carbon atoms respectively, It said, R ¹⁵ to R ¹⁸ may also form a ring with each other, in which case R ¹⁵ to R ¹⁸ is one out of more than -CO ₂ C 1 -C 15 - represents a divalent hydrocarbon group containing a partial structure and the rest Each independently represents a single bond or a linear, branched or cyclic alkylene group having 1 to 15 carbon atoms, R ¹⁹ represents an alkyl group containing a 7 to 15 polycyclic hydrocarbon group or a polycyclic hydrocarbon group, and R ²⁰ is An acid labile group is represented and X represents -CH ₂ -or -O-.
[4" claim-type="Currently amended] The resist material containing the high molecular compound in any one of Claims 1-3.
[5" claim-type="Currently amended] The process of apply | coating the resist material of Claim 4 on a board | substrate, the process of exposing with a high energy ray or an electron beam through a photomask after heat processing, and the process of developing using a developing solution after heat processing as needed. Pattern forming method characterized in that.

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引用文献:

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公开号 | 申请日 | 公开日 | 申请人 | 专利标题

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法律状态:
2000-04-28|Priority to JP2000129042

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2000-04-28|Priority to JP2000-129042

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2001-04-27|Application filed by 카나가와 치히로, 신에쓰 가가꾸 고교 가부시끼가이샤

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2001-11-09|Publication of KR20010099754A

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2006-05-29|Application granted

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2006-05-29|Publication of KR100584070B1

优先权:

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申请号 | 申请日 | 专利标题

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JP2000129042|2000-04-28|

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JP2000-129042|2000-04-28|